"FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible ..."

Muhammad Zubair Aslam et al. (2018)

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DOI: 10.3390/S18061687

access: open

type: Journal Article

metadata version: 2023-12-31

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Muhammad Zubair Aslam, Varun Jeoti, Saravanan Karuppanan, Aamir Farooq Malik, Asif Iqbal:
FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible AlN/SiO₂/Si Multilayer Structure. Sensors 18(6): 1687 (2018)

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