"Epitaxial Growth of Sc0.09Al0.91N and Sc0.18Al0.82N Thin Films on Sapphire ..."

Florian Bartoli et al. (2020)

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DOI: 10.3390/S20164630

access: open

type: Journal Article

metadata version: 2025-05-01

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Florian Bartoli, Jérémy Streque, Jaafar Ghanbaja, Philippe Pigeat, Pascal Boulet, Sami Hage-Ali, Natalya Naumenko, A. Redjaïmia, Thierry Aubert, Omar Elmazria:
Epitaxial Growth of Sc0.09Al0.91N and Sc0.18Al0.82N Thin Films on Sapphire Substrates by Magnetron Sputtering for Surface Acoustic Waves Applications. Sensors 20(16): 4630 (2020)

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