"Identification of Capacitive MEMS Accelerometer Structure Parameters for ..."

Vincas Benevicius, Vytautas Ostasevicius, Rimvydas Gaidys (2013)

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DOI: 10.3390/S130911184

access: open

type: Journal Article

metadata version: 2023-09-30

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Vincas Benevicius, Vytautas Ostasevicius, Rimvydas Gaidys:
Identification of Capacitive MEMS Accelerometer Structure Parameters for Human Body Dynamics Measurements. Sensors 13(9): 11184-11195 (2013)

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