"Fabrication and Performance of MEMS-Based Pressure Sensor Packages Using ..."

Lung-Tai Chen et al. (2009)

> Home

Details and statistics

DOI: 10.3390/S90806200

access: open

type: Journal Article

metadata version: 2022-10-02

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - journals/sensors/ChenCHC09
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/sensors/ChenCHC09
Lung-Tai Chen, Jin-Sheng Chang, Chung-Yi Hsu, Wood-Hi Cheng:
Fabrication and Performance of MEMS-Based Pressure Sensor Packages Using Patterned Ultra-Thick Photoresists. Sensors 9(8): 6200-6218 (2009)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.