"Equipment Anomaly Detection for Semiconductor Manufacturing by Exploiting ..."

Chieh-Yu Chen, Shi-Chung Chang, Da-Yin Liao (2020)

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DOI: 10.3390/S20195650

access: open

type: Journal Article

metadata version: 2020-12-25

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Chieh-Yu Chen, Shi-Chung Chang, Da-Yin Liao:
Equipment Anomaly Detection for Semiconductor Manufacturing by Exploiting Unsupervised Learning from Sensory Data. Sensors 20(19): 5650 (2020)

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