"An Experiment-Based Profile Function for the Calculation of Damage ..."

Qianhuang Chen, Tianyang Shao, Yan Xing (2020)

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DOI: 10.3390/S20082306

access: open

type: Journal Article

metadata version: 2020-05-30

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Qianhuang Chen, Tianyang Shao, Yan Xing:
An Experiment-Based Profile Function for the Calculation of Damage Distribution in Bulk Silicon Induced by a Helium Focused Ion Beam Process. Sensors 20(8): 2306 (2020)

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