"A Micro-Topography Measurement and Compensation Method for the Key ..."

Junying Chen et al. (2023)

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DOI: 10.3390/S23198307

access: open

type: Journal Article

metadata version: 2024-02-10

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Junying Chen, Boxuan Wang, Xiuyu Chen, Qingshan Jiang, Wei Feng, Zhilong Xu, Zhenye Zhao:
A Micro-Topography Measurement and Compensation Method for the Key Component Surface Based on White-Light Interferometry. Sensors 23(19): 8307 (2023)

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