"C-Axis Textured, 2-3 μm Thick Al0.75Sc0.25N Films Grown on Chemically ..."

Asaf Cohen et al. (2022)

> Home

Details and statistics

DOI: 10.3390/S22187041

access: open

type: Journal Article

metadata version: 2025-03-03

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - journals/sensors/CohenCCKFKKFWLE22
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/sensors/CohenCCKFKKFWLE22
Asaf Cohen, Hagai Cohen, Sidney R. Cohen, Sergey Khodorov, Yishay Feldman, Anna Kossoy, Ifat Kaplan-Ashiri, Anatoly I. Frenkel, Ellen Wachtel, Igor Lubomirsky, David Ehre:
C-Axis Textured, 2-3 μm Thick Al0.75Sc0.25N Films Grown on Chemically Formed TiN/Ti Seeding Layers for MEMS Applications. Sensors 22(18): 7041 (2022)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.