"Soft-Sensing Regression Model: From Sensor to Wafer Metrology Forecasting."

Angzhi Fan et al. (2023)

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DOI: 10.3390/S23208363

access: open

type: Journal Article

metadata version: 2024-02-29

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Angzhi Fan, Yu Huang, Fei Xu, Sthitie Bom:
Soft-Sensing Regression Model: From Sensor to Wafer Metrology Forecasting. Sensors 23(20): 8363 (2023)

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