"Design and Analysis of the Capacitive RF MEMS Switches with Support Pillars."

Hongbo Feng et al. (2022)

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DOI: 10.3390/S22228864

access: open

type: Journal Article

metadata version: 2023-01-24

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Hongbo Feng, Jiabin Zhao, Chengsi Zhou, Mingxin Song:
Design and Analysis of the Capacitive RF MEMS Switches with Support Pillars. Sensors 22(22): 8864 (2022)

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