"A Generalized Polynomial Chaos-Based Approach to Analyze the Impacts of ..."

Lili Gao, Zai-Fa Zhou, Qing-An Huang (2017)

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DOI: 10.3390/S17112561

access: open

type: Journal Article

metadata version: 2018-11-14

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Lili Gao, Zai-Fa Zhou, Qing-An Huang:
A Generalized Polynomial Chaos-Based Approach to Analyze the Impacts of Process Deviations on MEMS Beams. Sensors 17(11): 2561 (2017)

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