"Anodically Bonded Photoacoustic Transducer: An Approach towards ..."

Simon Gassner et al. (2022)

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DOI: 10.3390/S22020685

access: open

type: Journal Article

metadata version: 2022-04-09

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Simon Gassner, Rainer Schaller, Matthias Eberl, Carsten von Koblinski, Simon Essing, Mohammadamir Ghaderi, Katrin Schmitt, Jürgen Wöllenstein:
Anodically Bonded Photoacoustic Transducer: An Approach towards Wafer-Level Optical Gas Sensors. Sensors 22(2): 685 (2022)

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