"Effect of Imperfections Due to Material Heterogeneity on the Offset of ..."

Aldo Ghisi, Stefano Mariani (2019)

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DOI: 10.3390/S19153256

access: open

type: Journal Article

metadata version: 2020-05-30

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Aldo Ghisi, Stefano Mariani:
Effect of Imperfections Due to Material Heterogeneity on the Offset of Polysilicon MEMS Structures. Sensors 19(15): 3256 (2019)

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