"Physically-Based Reduced Order Modelling of a Uni-Axial Polysilicon MEMS ..."

Aldo Ghisi et al. (2012)

> Home

Details and statistics

DOI: 10.3390/S121013985

access: open

type: Journal Article

metadata version: 2019-10-19

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - journals/sensors/GhisiMCZ12
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/sensors/GhisiMCZ12
Aldo Ghisi, Stefano Mariani, Alberto Corigliano, Sarah Zerbini:
Physically-Based Reduced Order Modelling of a Uni-Axial Polysilicon MEMS Accelerometer. Sensors 12(10): 13985-14003 (2012)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.