"Optimization of a VOC Sensor with a Bilayered Diaphragm Using FBAR as ..."

Huihui Guo et al. (2017)

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DOI: 10.3390/S17081764

access: open

type: Journal Article

metadata version: 2018-11-14

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Huihui Guo, Aohui Guo, Yang Gao, Tingting Liu:
Optimization of a VOC Sensor with a Bilayered Diaphragm Using FBAR as Strain Sensing Elements. Sensors 17(8): 1764 (2017)

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