"Wafer Type Ion Energy Monitoring Sensor for Plasma Diagnosis."

Chansu Han et al. (2023)

> Home

Details and statistics

DOI: 10.3390/S23052410

access: open

type: Journal Article

metadata version: 2024-07-08

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - journals/sensors/HanKKCH23
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/sensors/HanKKCH23
Chansu Han, Yoonsung Koo, Jaehwan Kim, Kwangwook Choi, Sang Jeen Hong:
Wafer Type Ion Energy Monitoring Sensor for Plasma Diagnosis. Sensors 23(5): 2410 (2023)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.