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"Robust Pressure Sensor in SOI Technology with Butterfly Wiring for Airfoil ..."
Jan Niklas Haus et al. (2021)
- Jan Niklas Haus
, Martin Schwerter
, Michael Schneider
, Marcel Gäding
, Monika Leester-Schädel
, Ulrich Schmid, Andreas Dietzel
:
Robust Pressure Sensor in SOI Technology with Butterfly Wiring for Airfoil Integration. Sensors 21(18): 6140 (2021)
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