"Implementation of the CMOS MEMS Condenser Microphone with Corrugated Metal ..."

Chien-Hsin Huang et al. (2011)

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DOI: 10.3390/S110606257

access: open

type: Journal Article

metadata version: 2018-11-14

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Chien-Hsin Huang, Chien-Hsing Lee, Tsung-Min Hsieh, Li-Chi Tsao, Shaoyi Wu, Jhyy-Cheng Liou, Mingyi Wang, Li-Che Chen, Ming-Chuen Yip, Weileun Fang:
Implementation of the CMOS MEMS Condenser Microphone with Corrugated Metal Diaphragm and Silicon Back-Plate. Sensors 11(6): 6257-6269 (2011)

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