"Development and Evaluation of Ferrite Core Inductively Coupled Plasma ..."

Jong-Jin Hwang, Hyo-Jun Sim, Seung-Jae Moon (2024)

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DOI: 10.3390/S24155071

access: open

type: Journal Article

metadata version: 2024-08-22

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Jong-Jin Hwang, Hyo-Jun Sim, Seung-Jae Moon:
Development and Evaluation of Ferrite Core Inductively Coupled Plasma Radio Frequency Ion Source for High-Current Ion Implanters in Semiconductor Applications. Sensors 24(15): 5071 (2024)

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