"Design and Electro-Thermo-Mechanical Behavior Analysis of ..."

Seok-Won Kang et al. (2017)

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DOI: 10.3390/S17112510

access: open

type: Journal Article

metadata version: 2024-10-06

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  - journals/sensors/KangFKB17
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  - https://dblp.org/rec/journals/sensors/KangFKB17
Seok-Won Kang, Joe Fragala, Su-Ho Kim, Debjyoti Banerjee:
Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si₃N₄ Bimorph Microcantilevers for Static Mode Sensing. Sensors 17(11): 2510 (2017)

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