"Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators."

Pin-Hsu Kao et al. (2010)

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DOI: 10.3390/S100201315

access: open

type: Journal Article

metadata version: 2022-10-02

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Pin-Hsu Kao, Po-Jen Shih, Ching-Liang Dai, Mao-Chen Liu:
Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators. Sensors 10(2): 1315-1325 (2010)

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