"Development of the Tele-Measurement of Plasma Uniformity via Surface Wave ..."

Si-Jun Kim et al. (2023)

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DOI: 10.3390/S23052521

access: open

type: Journal Article

metadata version: 2023-08-28

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Si-Jun Kim, Minsu Choi, Sang-Ho Lee, Won-nyoung Jeong, Young-Seok Lee, In-Ho Seong, Chul-Hee Cho, Dae-Woong Kim, Shin-Jae You:
Development of the Tele-Measurement of Plasma Uniformity via Surface Wave Information (TUSI) Probe for Non-Invasive In-Situ Monitoring of Electron Density Uniformity in Plasma Display Fabrication Process. Sensors 23(5): 2521 (2023)

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