"Characterization of Thick and Thin Film SiCN for Pressure Sensing at High ..."

Alfin Leo et al. (2010)

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DOI: 10.3390/S100201338

access: open

type: Journal Article

metadata version: 2018-11-14

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Alfin Leo, Sergey Andronenko, Ion Stiharu, Rama B. Bhat:
Characterization of Thick and Thin Film SiCN for Pressure Sensing at High Temperatures. Sensors 10(2): 1338-1354 (2010)

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