"A Novel Tri-Axial Piezoelectric MEMS Accelerometer with Folded Beams."

Yan Liu et al. (2021)

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DOI: 10.3390/S21020453

access: open

type: Journal Article

metadata version: 2021-10-14

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Yan Liu, Bohao Hu, Yao Cai, Wenjuan Liu, Alexander Tovstopyat, Chengliang Sun:
A Novel Tri-Axial Piezoelectric MEMS Accelerometer with Folded Beams. Sensors 21(2): 453 (2021)

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