"3D FEM Analysis of High-Frequency AlN-Based PMUT Arrays on Cavity SOI."

Wenjuan Liu et al. (2019)

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DOI: 10.3390/S19204450

access: open

type: Journal Article

metadata version: 2025-05-31

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Wenjuan Liu, Leming He, Xubo Wang, Jia Zhou, Weijiang Xu, Nikolay Smagin, Malika Toubal, Hao Yu, Yuandong Gu, Jinghui Xu, Denis Remiens, Junyan Ren:
3D FEM Analysis of High-Frequency AlN-Based PMUT Arrays on Cavity SOI. Sensors 19(20): 4450 (2019)

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