"A GHz Silicon-Based Width Extensional Mode MEMS Resonator with Q over 10, 000."

Wenli Liu et al. (2023)

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DOI: 10.3390/S23083808

access: open

type: Journal Article

metadata version: 2023-07-07

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Wenli Liu, Yujie Lu, Zeji Chen, Qianqian Jia, Junyuan Zhao, Bo Niu, Wei Wang, Yalu Hao, Yinfang Zhu, Jinling Yang, Fuhua Yang:
A GHz Silicon-Based Width Extensional Mode MEMS Resonator with Q over 10, 000. Sensors 23(8): 3808 (2023)

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