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ORCID"Fabrication of Submicron Beams with Galvanic Etch Stop for Si in TMAH."
Rong Lu et al. (2009)
- Rong Lu, Yanhong Wu, Haitao Cheng, Heng Yang, Xinxin Li, Yuelin Wang:
Fabrication of Submicron Beams with Galvanic Etch Stop for Si in TMAH. Sensors 9(4): 2470-2477 (2009)
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