"Semi-Supervised Deep Kernel Active Learning for Material Removal Rate ..."

Chunpu Lv et al. (2023)

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DOI: 10.3390/S23094392

access: open

type: Journal Article

metadata version: 2023-07-07

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Chunpu Lv, Jingwei Huang, Ming Zhang, Huangang Wang, Tao Zhang:
Semi-Supervised Deep Kernel Active Learning for Material Removal Rate Prediction in Chemical Mechanical Planarization. Sensors 23(9): 4392 (2023)

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