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ORCID"Two-Scale Simulation of Drop-Induced Failure of Polysilicon MEMS Sensors."
Stefano Mariani et al. (2011)
- Stefano Mariani
, Aldo Ghisi, Alberto Corigliano, Roberto Martini, Barbara Simoni:
Two-Scale Simulation of Drop-Induced Failure of Polysilicon MEMS Sensors. Sensors 11(5): 4972-4989 (2011)
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