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ORCID"Resonant MEMS Pressure Sensor in 180 nm CMOS Technology Obtained by BEOL ..."
Diana Mata-Hernandez et al. (2020)
- Diana Mata-Hernandez
, Daniel Fernández, Saoni Banerji, Jordi Madrenas:
Resonant MEMS Pressure Sensor in 180 nm CMOS Technology Obtained by BEOL Isotropic Etching. Sensors 20(21): 6037 (2020)
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