"Sensitivity Enhancement of Silicon-on-Insulator CMOS MEMS Thermal Hot-Film ..."

Zahid Mehmood et al. (2019)

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DOI: 10.3390/S19081860

access: open

type: Journal Article

metadata version: 2021-10-14

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Zahid Mehmood, Ibraheem Haneef, Syed Zeeshan Ali, Florin Udrea:
Sensitivity Enhancement of Silicon-on-Insulator CMOS MEMS Thermal Hot-Film Flow Sensors by Minimizing Membrane Conductive Heat Losses. Sensors 19(8): 1860 (2019)

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