"Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence ..."

Sabina Merlo et al. (2017)

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DOI: 10.3390/S17030462

access: open

type: Journal Article

metadata version: 2018-11-14

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Sabina Merlo, Paolo Poma, Eleonora Crisà, Dino Faralli, Marco Soldo:
Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry. Sensors 17(3): 462 (2017)

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