"Modeling and Design Parameter Optimization to Improve the Sensitivity of a ..."

Sulaiman Mohaidat, Fadi Alsaleem (2024)

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DOI: 10.3390/S24113626

access: open

type: Journal Article

metadata version: 2025-03-03

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Sulaiman Mohaidat, Fadi Alsaleem:
Modeling and Design Parameter Optimization to Improve the Sensitivity of a Bimorph Polysilicon-Based MEMS Sensor for Helium Detection. Sensors 24(11): 3626 (2024)

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