"CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing."

Martin Nirschl et al. (2010)

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DOI: 10.3390/S100504180

access: open

type: Journal Article

metadata version: 2018-11-14

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  - https://dblp.org/rec/journals/sensors/NirschlRTAHPSV10
Martin Nirschl, Arto Rantala, Kari Tukkiniemi, Sanna Auer, Ann-Charlotte Hellgren, Dana Pitzer, Matthias Schreiter, Inger Vikholm-Lundin:
CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing. Sensors 10(5): 4180-4193 (2010)

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