"A 3.06 μm Single-Photon Avalanche Diode Pixel with Embedded Metal ..."

Jun Ogi et al. (2023)

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DOI: 10.3390/S23218906

access: open

type: Journal Article

metadata version: 2024-01-26

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Jun Ogi, Fumiaki Sano, Tatsuya Nakata, Yoshiki Kubo, Wataru Onishi, Charith Koswaththage, Takeya Mochizuki, Yoshiaki Tashiro, Kazuki Hizu, Takafumi Takatsuka, Iori Watanabe, Fumihiko Koga, Tomoyuki Hirano, Yusuke Oike:
A 3.06 μm Single-Photon Avalanche Diode Pixel with Embedded Metal Contact and Power Grid on Deep Trench Pixel Isolation for High-Resolution Photon Counting. Sensors 23(21): 8906 (2023)

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