"The Fabrication and Evaluation of a Capacitive Pressure Sensor Using ..."

Hodaka Otsuka et al. (2023)

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DOI: 10.3390/S23239557

access: open

type: Journal Article

metadata version: 2024-10-06

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Hodaka Otsuka, Takafumi Ninoseki, Chiemi Oka, Seiichi Hata, Junpei Sakurai:
The Fabrication and Evaluation of a Capacitive Pressure Sensor Using Ru-Based Thin Film Metallic Glass with Structural Relaxation by Heat Treatment. Sensors 23(23): 9557 (2023)

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