"Development of Diamond and Silicon MEMS Sensor Arrays with Integrated ..."

Maira Possas-Abreu et al. (2017)

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DOI: 10.3390/S17061163

access: open

type: Journal Article

metadata version: 2025-03-03

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Maira Possas-Abreu, Farbod Ghassemi, Lionel Rousseau, Emmanuel Scorsone, Emilie Descours, Gaëlle Lissorgues:
Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection. Sensors 17(6): 1163 (2017)

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