"Design and 3D FEM Analysis of a Flexible Piezoelectric Micromechanical ..."

Qinghua Ren et al. (2022)

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DOI: 10.3390/S22218100

access: open

type: Journal Article

metadata version: 2022-12-05

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  - https://dblp.org/rec/journals/sensors/RenCLZG22
Qinghua Ren, Junhong Chen, Xin Liu, Songsong Zhang, Yuandong Gu:
Design and 3D FEM Analysis of a Flexible Piezoelectric Micromechanical Ultrasonic Transducer Based on Sc-Doped AlN Film. Sensors 22(21): 8100 (2022)

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