"Characterizing Dielectric Permittivity of Nanoscale Dielectric Films by ..."

He Ren, Weifeng Sun (2019)

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DOI: 10.3390/S19245405

access: open

type: Journal Article

metadata version: 2025-10-17

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He Ren, Weifeng Sun:
Characterizing Dielectric Permittivity of Nanoscale Dielectric Films by Electrostatic Micro-Probe Technology: Finite Element Simulations. Sensors 19(24): 5405 (2019)

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