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"Multi-Repeated Projection Lithography for High-Precision Linear Scale ..."
Dongxu Ren et al. (2016)
- Dongxu Ren
, Huiying Zhao, Chupeng Zhang, Daocheng Yuan
, Jianpu Xi, Xueliang Zhu, Xinxing Ban, Longchao Dong, Yawen Gu, Chunye Jiang:
Multi-Repeated Projection Lithography for High-Precision Linear Scale Based on Average Homogenization Effect. Sensors 16(4): 538 (2016)
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