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"Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with ..."

Changhe Sun et al. (2021)

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DOI: 10.3390/S21165513

access: open

type: Journal Article

metadata version: 2021-09-01

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Changhe Sun, Yufei Liu, Bolun Li, Wenqu Su, Mingzhang Luo, Guofeng Du, Yaming Wu:
Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles. Sensors 21(16): 5513 (2021)

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