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"Design and Characterization of 5 μm Pitch InGaAs Photodiodes Using In ..."
Jules Tillement et al. (2023)
- Jules Tillement
, Cyril Cervera, Jacques Baylet, Christophe Jany, François Nardelli, Thomas Di Rito, Sylvain Georges, Gabriel Mugny, Olivier Saxod, Olivier Gravrand, Thierry Baron
, François Roy
, Frédéric Boeuf
:
Design and Characterization of 5 μm Pitch InGaAs Photodiodes Using In Situ Doping and Shallow Mesa Architecture for SWIR Sensing. Sensors 23(22): 9219 (2023)
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