"A Low Temperature Drifting Acoustic Wave Pressure Sensor with an ..."

Tao Wang et al. (2020)

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DOI: 10.3390/S20061788

access: open

type: Journal Article

metadata version: 2022-10-02

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  - https://dblp.org/rec/journals/sensors/WangTLZWWGLZ20
Tao Wang, Zhengjie Tang, Huamao Lin, Kun Zhan, Jiang Wan, Shihao Wu, Yuandong Gu, Wenbo Luo, Wanli Zhang:
A Low Temperature Drifting Acoustic Wave Pressure Sensor with an Integrated Vacuum Cavity for Absolute Pressure Sensing. Sensors 20(6): 1788 (2020)

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