"A Study on the Harmonic Distortion of Seismic-Grade Sigma-Delta MEMS ..."

Xuefeng Wang, Penghao Zhang, Shijin Ding (2023)

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DOI: 10.3390/S23198222

access: open

type: Journal Article

metadata version: 2024-02-01

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Xuefeng Wang, Penghao Zhang, Shijin Ding:
A Study on the Harmonic Distortion of Seismic-Grade Sigma-Delta MEMS Accelerometers Using a Multiple Degree-of-Freedom Model. Sensors 23(19): 8222 (2023)

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