"A Three-Dimensional Microdisplacement Sensing System Based on MEMS ..."

Junjie Wu et al. (2014)

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DOI: 10.3390/S141120533

access: open

type: Journal Article

metadata version: 2018-11-14

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Junjie Wu, Lihua Lei, Xin Chen, Xiaoyu Cai, Yuan Li, Tao Han:
A Three-Dimensional Microdisplacement Sensing System Based on MEMS Bulk-Silicon Technology. Sensors 14(11): 20533-20542 (2014)

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