"A New Z-axis Resonant Micro-Accelerometer Based on Electrostatic ..."

Bo Yang et al. (2015)

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DOI: 10.3390/S150100687

access: open

type: Journal Article

metadata version: 2023-07-05

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Bo Yang, Xingjun Wang, Bo Dai, Xiaojun Liu:
A New Z-axis Resonant Micro-Accelerometer Based on Electrostatic Stiffness. Sensors 15(1): 687-702 (2015)

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