"Self-Locking Avoidance and Stiffness Compensation of a Three-Axis ..."

Yonggang Yin, Boqian Sun, Fengtian Han (2016)

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DOI: 10.3390/S16050711

access: open

type: Journal Article

metadata version: 2018-11-14

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Yonggang Yin, Boqian Sun, Fengtian Han:
Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer. Sensors 16(5): 711 (2016)

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