"Electrostatic-Fluid-Structure 3D Numerical Simulation of a MEMS ..."

Zhanqing Yu et al. (2022)

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DOI: 10.3390/S22031056

access: open

type: Journal Article

metadata version: 2022-02-25

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Zhanqing Yu, Shiping Chen, Ya Mou, Fade Hu:
Electrostatic-Fluid-Structure 3D Numerical Simulation of a MEMS Electrostatic Comb Resonator. Sensors 22(3): 1056 (2022)

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