"A Novel Rolling-Window and Production-Maintenance-Based Machine Learning ..."

Shu-Kai S. Fan, An-Ting Zheng (2025)

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DOI: 10.1109/TASE.2025.3570863

access: closed

type: Journal Article

metadata version: 2025-07-04

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Shu-Kai S. Fan, An-Ting Zheng:
A Novel Rolling-Window and Production-Maintenance-Based Machine Learning Approach to Virtual Metrology in Semiconductor Manufacturing. IEEE Trans Autom. Sci. Eng. 22: 15713-15727 (2025)

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