"Prototyping of Beam Shaping Diffraction Gratings by AFM Nanoscale Patterning."

Lo Ming Fok, Yun-Hui Liu, Wen Jung Li (2010)

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DOI: 10.1109/TASE.2009.2014387

access: closed

type: Journal Article

metadata version: 2024-09-19

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Lo Ming Fok, Yun-Hui Liu, Wen Jung Li:
Prototyping of Beam Shaping Diffraction Gratings by AFM Nanoscale Patterning. IEEE Trans Autom. Sci. Eng. 7(1): 49-57 (2010)

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